Title | Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | A. C. Kozen, M. A. Schroeder, K. D. Osborn, C. J. Lobb, and G. W. Rubloff |
Journal | Appl. Phys. Lett. |
Volume | 102 |
Date Published | APR 29 |
ISSN | 0003-6951 |
DOI | 10.1063/1.4801979 |