| Title | Examining the role of hydrogen in the electrical performance of in situ fabricated metal-insulator-metal trilayers using an atomic layer deposited Al2O3 dielectric |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | A. C. Kozen, M. A. Schroeder, K. D. Osborn, C. J. Lobb, and G. W. Rubloff |
| Journal | Appl. Phys. Lett. |
| Volume | 102 |
| Date Published | APR 29 |
| ISSN | 0003-6951 |
| DOI | 10.1063/1.4801979 |
